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Belt Sorters

Modular Concept

  • Flexible intergration of MX 202 modules
  • Short production time
  • Extreme lifespan
  • Low maintenance
  • Mature and long term field approved design
  • More than 25 years experience with belt sorters

We customize your MX 202 perfectly fitting to your demands (e.g. metrology, sender/receiver stations).

Speed, Speed and Speed. Sort with up to 1000 Wafers per hour.

Handling Modules

  • Sender/receiver lifts
  • Wafer switches to distribute Wafers in receiver area
  • Movable units with mounted lifts
  • Pass through stations

MX 202 Metrology Modules

  • AZ6 (6-33) or AZ8 (8-37) geometry module
  • T-Module with single thickness sensor pair
  • Resistivity module with integrated optional P/N sensor

Software & Automation

All our MX tool series use one and the same Windows operating software MX-NT V2. It combines more than 20 years expericence in Semiconductor requirements.
Sorting by any gained characteristic, such as grouping by thickness, can be done by highly flexible and reusable recipes.

All data can be stored in a MS SQL Server data base or alternatively also into MS Access data bases.

Powerful software options such as a SECS/GEM automation interface or our similar proprietary Simple Soap Server One (S³O) interface allow seamless integration of E+H tools into your production plant.