Consisting out of
- MX 204-8-21-V Geometry tool for thin Wafers
- Single arm robot
- 1 Carrier Station
- Aligner
- Light Tower
- Case which can be opened
Consisting out of
- Dual arm robot on track
- 7 Carrier Stations
- Aligner
- OCR Wafer ID Reader
Consisting out of
- MX 2012 Geometry
- MX 6012 Resistivity/Thickness
- Dual arm robot on track
- 15 Carrier Stations
- Aligner
- OCR Wafer ID Reader
Please request your desired configuration from your local distributor or from E+H Metrology directly.