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Manual Wafer Measurement Tools - MX Series

The MX base series are manual tools, where some of them can also be used as modules on E+H automatic robot tools or as OEM tools.
Please note that all technical tool specifications can be modified to your wishes in accordance with the physical limits of the tool.

Tool overview as PDF

(Click to enlarge)

Tool overview as a table


MX Series


 Thickness

 Flattness

 Bow / Warp

 Geometry

 Resistivity / Sheet Resistivity

 P/N

 Waviness

 Roughness

   Can be used on automatic tools

MX 10x

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MX 15x

------

MX 20x

----
(1)

MX 30x

--------

MX 60x

 


(1)
---
(2)
--
(1)

MX 70x

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Legend: 1= Partially supported, 2= Option