Manual Wafer Measurement Tools - MX Series

The MX base series are manual tools, where some of them can also be used as modules on E+H automatic robot tools or as OEM tools.
Please note that all technical tool specifications can be modified to your wishes in accordance with the physical limits of the tool.

Tool overview as PDF

(Click to enlarge)

Tool overview as a table

MX Series



 Bow / Warp


 Resistivity / Sheet Resistivity




   Can be used on automatic tools

MX 10x


MX 15x


MX 20x


MX 30x


MX 60x



MX 70x


Legend: 1= Partially supported, 2= Option