Manual Wafer Measurement Tools - MX Series
The MX base series are manual tools, where some of them can also be used as modules on E+H automatic robot tools or as OEM tools.
Please note that all technical tool specifications can be modified to your wishes in accordance with the physical limits of the tool.
Search Measurement Tools by Characteristics
Tool overview as PDF
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Tool overview as a table
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MX 10x |
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MX 15x |
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MX 20x
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MX 30x
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MX 60x
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MX 70x |
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Legend: 1= Partially supported, 2= Option