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MX 102-8

For:

Thickness, TTV

Features:

  • Up to four thickness measuring range user selectable
  • Dynamic range 100 or 350µm
  • Wafer diameter 6" and 8"
  • Accuracy 0.1µm
  • Resolution 10nm
  • Spartial resolution 1mm
  • 4 scans
  • Software MXNT