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MX20 - MULTIFUNCTIONAL
contactless wafer geometry gauge

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The MX20 series is best suited for incoming inspection, qualification of processes and process control for a large variation of silicon,  solar and other wafers. Partially integrable into automated processes.

Measurement types for the MX 20 Series:

Thickness Flatness (TTV) Bow Warp Film stress
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MX20 Series
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Wafer Size
Characteristica
Compatible with
Wafer Properties
Wafer Form
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Peter Michel

+49 (0)721 83118-17
sales(at)eh-metrology.com

 

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