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MX 2018

For:

Bow, Warp

Features:

  • Automatic wafer geometry gauge
  • Wafer diameter 300mm, 450mm
  • Warp range 800µm
  • Bow (best fit) Range +/-500µm
  • Accuracy +/- (5µm+5% of reading)
  • Precision +/- (0.5µm+1% of reading) (1 sigma)
  • FQA 434mm
  • Measurement Resolution 0.05µm
  • Software MXNT