For:

Thickness, TTV, Bow, Warp

Features:

• Automatic wafer geometry gauge
• Wafer size 125x125 and 156x156
• Thickness range 200 - 600µm
• Accuracy 1µm
• Resolution 0.1µm
• Software MXNT

Warp and Bow-bf do not include gravity correction

The sensors are embedded in a radial pattern.

The next gauge generation with cartesian pattern is the MX 204-8-49-q.