PRIVACY POLICY | LEGAL INFORMATION
 

MX 60x

Contactless Wafer Gauge for Resistivity, Thickness (*1) and P/N (*2)

The MX60x series measure Resistivity or Sheet Resistance of silicon and other materials.

*1 Option/Feature of MX 604-ST, MX 608, MX 608-q and MX 6012
*2 Option of MX 608, MX 608-q and MX 6012 

Applications

  • Wafer manufacturing
  • Reclaimer
  • R&D
  • In process control for
    • Thickness
    • TTV
    • Resistivity / Sheet Resistance
    • RRV (partially)
    • Dopant

Low Resistivity

Gauge Types Wafer Diameter Resistivity Range Thickness Range
MX 604 / MX 604-B silicon blocks 0.25 - 25 Ohm*cm  
MX 604-S 2" - 8" 0.1 - 50 Ohm/square 200 - 900µm
MX 604-ST 125x125, 156x156mm
2"-6"
0.06 - 30 Ohm*cm 60 - 300µm
MX 608 6", 8" 0.001 - 200 Ohm*cm 500 - 800µm
MX 608-q 125x125, 156x156mm 0.1 - 50 Ohm*cm 150 - 350µm
MX 6012 8", 12" 0.001 - 200 Ohm*cm 600 - 900µm

High Resistivity

Gauge Types Wafer Diameter Resistivity Range Thickness Range
MX 601 up to 6" 5E4 to 5E9 Ohm*cm 350 - 650µm
MX 6010 2", 3", 4" 2E5 to 2E9 Ohm*cm 300 - 600µm
MX 6012
MX 604
MX 604-B
MX 601