MX 60x
Contactless Wafer Gauge for Resistivity, Thickness (*1) and P/N (*2)
- MX 6012
- MX 604
- MX 604-B
- MX 601
The MX60x series measure Resistivity or Sheet Resistance of silicon and other materials.
*1 Option/Feature of MX 604-ST, MX 608, MX 608-q and MX 6012
*2 Option of MX 608, MX 608-q and MX 6012
Applications
- Wafer manufacturing
- Reclaimer
- R&D
- In process control for
- Thickness
- TTV
- Resistivity / Sheet Resistance
- RRV (partially)
- Dopant
Low Resistivity
| Gauge Types | Wafer Diameter | Resistivity Range | Thickness Range |
| MX 604 / MX 604-B | silicon blocks | 0.25 - 25 Ohm*cm | |
| MX 604-S | 2" - 8" | 0.1 - 50 Ohm/square | 200 - 900µm |
| MX 604-ST | 125x125, 156x156mm 2"-6" |
0.06 - 30 Ohm*cm | 60 - 300µm |
| MX 608 | 6", 8" | 0.001 - 200 Ohm*cm | 500 - 800µm |
| MX 608-q | 125x125, 156x156mm | 0.1 - 50 Ohm*cm | 150 - 350µm |
| MX 6012 | 8", 12" | 0.001 - 200 Ohm*cm | 600 - 900µm |
High Resistivity
| Gauge Types | Wafer Diameter | Resistivity Range | Thickness Range |
| MX 601 | up to 6" | 5E4 to 5E9 Ohm*cm | 350 - 650µm |
| MX 6010 | 2", 3", 4" | 2E5 to 2E9 Ohm*cm | 300 - 600µm |