For:

Resistivity

Features:

• Resistivity of semi-insulating materials (GaAs, SiC, InP, GaN)
• Non-contact, capacitive measuring method
• Fast, excellent repeatabilit
• No recalibration required

Wafer Diameters   2”, 3”, 4”

Thickness              300 – 600 µm

Resistivity              2*10⁵ – 2*10⁹ Ohm*cm

Restivity Measurement:

Accuracy        +/- 10 %

Precision        +/- 1 %