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MX 604-S

For:

Sheet Resistance

Features:

  • Standard measuring range  0.1 to 50 Ohm/square
  • Accuracy ±3%
  • Repeatability (constant temperature)  0.5% (1 sigma)
  • Wafer diameter 2" to 8"
  • Wafer thickness 200 to 900µm
  • Software EHMaster