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MX 604-ST

For: Thickness and Resistivity

Features

  • Square, Pseudo-Square Solar Wafers up to 156mm
  • 2" to 6" round Wafers
  • Fast measurement: ~ 0.3 sec
  • Can work stand alone or
    connected optionally to a PC

Thickness

  • Range 60 - 300 µm
    (Up to factor two higher thicknesses and sheet resistances are possible with accordingly reduced accuracy)
  • Accuracy ± 1 µm

Resistivity

  • Range
    0.06 up to 6 Ohm*cm at Thk = 60 µm
    0.3 up to 30 Ohm*cm at Thk = 300 µm
  • Accuracy ± 5% (constant temperature)