Special tool for PV/Solar Wafers

For:

Thickness, TTV, Resistivity

Features:

• One or two scans (90°) possible
• 1 up to 57 measurement points
• Wafer type 125x125 and 156x156mm
  (and pseudo square)

     Thickness:

• Range 150 - 350µm
• Accuracy ±1µm
• Resolution 10nm

    Resistivity:

• Range 0.1mohm*cm up to 50 ohm*cm