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MX 7012

For:

Thickness, TTV, Warp, Waviness, Roughness*

Features:

  • Thickness range 780 - 970µm
  • Wafer diameter 300mm
  • Software MXNT
  • Thickness Accuracy ±0.3µm
  • Resolution 2nm
  • Spartial resolution 0.2mm
  • Warp Accuracy ±3µm
  • Waviness Accuracy ±1µm
  • Optional: Optical roughness scan