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Examples

MX 204-8-21-V-RA-1C

Consisting out of

  • MX 204-8-21-V Geometry tool for thin Wafers
  • Single arm robot
  • 1 Carrier Station
  • Aligner
  • Light Tower
  • Case which can be opened

MX ID-Sorter-DRAT-7C

Consisting out of

  • Dual arm robot on track
  • 7 Carrier Stations
  • Aligner
  • OCR Wafer ID Reader

MX 2012-6012-DRAT-15C

Consisting out of

  • MX 2012 Geometry
  • MX 6012 Resistivity/Thickness
  • Dual arm robot on track
  • 15 Carrier Stations
  • Aligner
  • OCR Wafer ID Reader

MX 204-608-R-4C

Consisting out of

More Examples

Please request your desired configuration from your local distributor or from E+H Metrology directly.