Metrology Solutions for the
Semiconductor and PV/Solar
World
MX 1012
For:
Thickness, TTV
Features:
- Up to four thickness measuring range user selectable
- Dynamic range 100 or 350µm
- Wafer diameter 8" and 12"
- Accuracy 0.1µm
- Resolution 10nm
- Spartial resolution 1mm
- Up to 8 scans
- Software MXNT