For:

Thickness, TTV, Warp, Waviness, Roughness*

Features:

• Thickness range 780 - 970µm
• Wafer diameter 300mm
• Software MXNT
• Thickness Accuracy ±0.3µm
• Resolution 2nm
• Spartial resolution 0.2mm
• Warp Accuracy ±3µm
• Waviness Accuracy ±1µm
• Optional: Optical roughness scan