Metrology to control your process

Mature - Fast - Precise

The mature design of our Metrology Tools lower maintenance costs and allow extreme uptimes. The metrology focuses tightly your application, waives on unnecessary "bells and whistles" to maximize throughput & reliability and to minimize tool cost. The contactless hybrid sensor technology combines in an appropiate way different worlds of metrology methods to achieve precise and repeatable results.

Standard Metrology Solutions

All standard MX metrology products can be found at the top navigation below products.
Many of these MX modules can be combined on an automated sorter to meet your requirements.

Customized Wafer Metrology Solutions

All products can be customized
according to your requirements.
Please contact us for more

Wafer Metrology Tool/Sorter


Member ID: 4817



Member of IPVEA


High Resolution Wafer Thickness
Wafer thickness measurement map 3D
Precise Wafer Warp / Bow
Wafer warp measurement map 3D
Resistivity Map of a Wafer
Wafer resistivity measurement map 3D