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MX60 – RESISTIVITY GAUGE
for wafer characterization

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The MX60 series measures resistivity of silicon blocks or wafers, solar wafers and semi-insulating materials. Partially integrable into automated processes.

Measurement types for the MX 60 Series:

Thickness Resistivity Sheet resistance P/N Dotation
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Peter Michel

+49 (0)721 83118-17
sales(at)eh-metrology.com

 

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