EHMaster
Supported E+H tools
EHMaster supports these tools as a operating software:
- MX 152
- MX 30x series
- MX 604
- MX 601x
EHMaster is also included inside MX-NT as a helpful maintenance software to trouble shoot metrology modules.
EHMaster
- MX-NT V2
Main operating software
- EHMaster
Maintenance software and operating software for smaller tools
- Waferstudio
3D Visualization and Analysis