MX-NT V2
MX-NT is the main E+H operating software. It supports all major E+H tool types, except smaller tools which can also work without a PC. These smaller tool types can optionally be connected to a PC using EHMaster.
MX-NT is developed since more than 10 years and combines more than 20 years experience in Semiconductor requirements within one product.
A unified easy-to-use interface allows operators to work instantly with any E+H tool. Engineers use sophisticated functions, protected by a password system, to configure the system to the requirements of your process.
Supported E+H tools
- All MX series (except MX 152, MX 30x series, MX 604, MX 601x)
- Supports manual and automatic tools (robot or belt)
- Supported subcomponents
- Belt transport system
- Robot (single, dual arm)
- Prealigner
- Wafer Mapper
- Wafer ID Readers (OCR)
- Carrier ID readers (RFID)
- Light Tower
- Load Port, E84
- I/O Subsystems for additional features where sensors and actors are needed, e.g. push buttons or feedback of minienvironment filter status
Main Features
- Calculates all major characteristics according to the used metrology modules (e.g. TTV, FPD, Stress, RRV, etc)
- Customizable screen layout with many different view types of data
- Highly flexible recipe based jobs where any setting can also be inputed by the user or transmitted by a host
- Structured storage of measurement data inside MS SQL Server or MS Access data base engines
- Automation interfaces: SECS/GEM, S³O and IPC
MX-NT
- MX-NT V2
Main operating software
- EHMaster
Maintenance software and operating software for smaller tools
- Waferstudio
3D Visualization and Analysis
