MX 10x series
High Resolution Wafer Thickness and Thickness Variation Gauge
- MX 10x, Thickness (black lines = measurement points)
The MX10x series measure thickness and thickness variation on silicon wafers. It has a resolution of 10 nanometers and can be adapted to different thickness ranges within a few seconds. Before starting to scan the wafer, the gauge recalibrates itself automatically by means of a standard thickness gauge block. A pair of capacitive sensors samples four radial profiles (45 degrees) on every wafer.
Applications
- R&D
- Qualification of processes
- In process control of
- Thickness
- TTV
MX 10x Types
| MX Type Name | Wafer diameter [mm] |
| MX 102-6 | 100, 125, 150 |
| MX 102-8 | 150, 200 |
| MX 1012 | 200, 300 |
| MX 1018 | 300, 450 |
