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MX 204-8-49-q

For:

Thickness, TTV, Bow, Warp

Features:

  • Automatic wafer geometry gauge
  • Wafer size 125x125 and 156x156
  • Thickness range 100 - 600µm
  • Accuracy 1µm
  • Resolution 0.1µm
  • Software MXNT

Warp and Bow-bf do not include gravity correction