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MX 6012

For:

Thickness, TTV, Resistivity, Dotation (PN)

 Features:

  • One or two scans (90°) possible
  • 1 up to 57 measurement points
  • Wafer diameter up to 300mm

     Thickness:

  • Dynamic range 300µm
  • Accuracy ±0.3µm
  • Resolution 10nm

    Resistivity:

  • Range: 0.001 up to 200 ohm*cm

    Dotation:

  • Range: 0.02 up to 200 ohm*cm