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FLEXIBLE WAFER MEASUREMENT
for wide-range requirements

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The MX base series are manual tools for lots of wafer gauge needs. In addition, they can be adapted to your specific needs.

Technical tool specifications can be modified (in accordance with the physical limits). Some of them can be used as modules on E+H automatic robot tools as well.

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Manual Tools
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MX 1012

High-resolution thickness and flatness (TTV) gauge for 200–300mm silicon wafers.

MX 1018

High-resolution thickness and flatness (TTV) gauge for 300–450mm silicon wafers.

MX 102-6

High-resolution thickness and flatness (TTV) gauge for 100–150mm silicon wafers.

No Match? No Problem!

We are able to customize our products to a wide range of technical specifications. Which are yours?

MX 102-8

High-resolution thickness and flatness (TTV) gauge for 150–200mm silicon wafers.

MX 2012

High precision chip production geometry gauge for 300mm silicon wafers.

MX 2012-H

fast chip production geometry gauge for 300mm silicon wafers.

MX 2013

Automatable geometry gauge for thin and standard 200mm or 300mm silicon wafers.

MX 2018-W

Automatable bow and warp gauge for 450mm silicon wafers.

MX 203-4-21

Fast contactless geometry gauge for 2–4" silicon wafers.

MX 203-4-37-Q

Fast contactless geometry gauge for 2–4" non-conductive and semi-insulating wafers.

MX 203-58-37-B

Fast contactless geometry gauge for thin 125– 200mm silicon wafers.

MX 203-6-33

Fast contactless geometry gauge for 100–150mm silicon wafers.

MX 203-6-33-B

Fast contactless geometry gauge for thin 100–150mm silicon wafers.

MX 203-6-33-Q

Fast contactless geometry gauge for 75–200mm non-conductive and semi-insulating wafers.

MX 203-8-37

Fast contactless geometry gauge for 150mm and 200mm silicon wafers.

MX 203-8-37-B

Fast contactless geometry gauge for thin 150mm and 200mm silicon wafers.

MX 203-8-49-B

Fine mesh contactless geometry gauge for thin 150mm and 200mm silicon wafers.

MX 204-48-37

Automatable geometry gauge for 100, 150 and 200mm silicon wafers.

MX 204-6-13-V

Automatable geometry gauge for thin 100–150mm silicon wafers.

MX 204-6-33

Automatable geometry gauge for 100mm and 150mm silicon wafers.

MX 204-8-21-TKO2

Automatable geometry gauge for thin 150mm and 200mm Taiko silicon wafers.

MX 204-8-21-V

Automatable geometry gauge for thin 150mm and 200mm silicon wafers.

MX 204-8-37

Automatable geometry gauge for 150mm and 200mm silicon wafers.

MX 301-8

Easy one-point thickness gauge for 30–200mm silicon wafers.

MX 301-AC

Easy one-point thickness gauge for 30–200mm semiconducting and metallic materials.

MX 301-Q

Easy one-point thickness gauge for 30–200mm non-conductive wafers.

MX 3012

Easy one-point thickness gauge for 75mm to 300mm silicon wafers.

MX 3012-AC

Easy one-point thickness gauge for 75mm to 300mm semiconducting and metallic materials.

MX 3014

Contactless wafer thickness profile measuring instrument for 150mm and 200mm silicon wafers.
MX 302 Manual Geometry Measurement Tool for Silicon Wafers by E+H Metrology

MX 302

Contactless wafer thickness profile measuring instrument for 150mm and 200mm silicon wafers.

MX 601

Fast contactless resistivity gauge for semi-insulating wafers up to 150mm.

MX 6012

Combined thickness and resistivity gauge for 200 mm and 300 mm silicon wafers.

MX 604

Fast contactless resistivity gauge for silicon blocks.

MX 604-B

Portable contactless resistivity gauge for silicon blocks.

MX 604-S

Fast sheet resistance gauge for 2" to 200mm silicon wafers and conductive films.

MX 604-ST

Combined thickness and resistivity gauge for up to 156mm solar wafers.

MX 608

Combined thickness and resistivity gauge for 150mm and 200mm silicon wafers.

MX 7012

High resolution thickness and surface profiler for etched 300mm silicon wafers.

MX 7018

High resolution thickness and surface profiler for as-sawn 450mm silicon wafers.

WHICH TOOL
fits my needs?

You have questions, wishes or an order?
We will be happy to consult you personally.


E+H Metrology is committed to protecting and respecting your privacy. We only use your personal information to administer your account and to provide the products and services you have requested.

Portrait of Peter Michel, Product Sales Manager of E+H Metrology

Peter Michel

+49 (0)721 83118-17
sales(at)eh-metrology.com

 

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