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MX 601


Fast contactless resistivity gauge for semi-insulating wafers up to 150mm.

The MX601 gauges resistivity of wafers made of semi-insulating materials like Gallium Arsenide or Silicon Carbide. Fast handling without wafer preparation and excellent repeatability with best avoidance of piezo-electric effects. MX601’s serial interface allows data evaluation and statistics, as well as access to calibration constants and output types.

Measurement type



Wafer Diameter up to 150mm
Sensor Area Ø 10mm
Thickness range 350 - 650 µm
Measuring Time max. 4 sec.
Reproducibility ± 1%
Software EHMaster

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Peter Michel

+49 (0)721 83118-17


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