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Fast contactless resistivity gauge for semi-insulating wafers up to 150mm.
The MX601 gauges resistivity of wafers made of semi-insulating materials like Gallium Arsenide or Silicon Carbide. Fast handling without wafer preparation and excellent repeatability with best avoidance of piezo-electric effects. MX601’s serial interface allows data evaluation and statistics, as well as access to calibration constants and output types.
Wafer Diameter | up to 150mm |
Sensor Area Ø | 10mm |
Thickness range | 350 - 650 µm |
Measuring Time | max. 4 sec. |
Reproducibility | ± 1% |
Software | EHMaster |
You have questions, wishes or an order?
We will be happy to consult you personally.