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About E+H Metrology

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E+H Metrology develops measurement systems and software for the edges of the measurable. All our experts are dedicated to high technology: the semiconductor industry, micro electronics, mechanical engineering or the ceramics industry are our customers. We measure down to the subnano range wafers, photovoltaic products and any cutting-edge material.

For more than 54 years, our interdisciplinary teams have been developing highly specialized customer solutions for all measurement tasks with passion and know-how: almost all our products are individually planned and implemented. We measure. Made to measure.

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Our customer needs

Developing the future: No matter how broad the spectrum of our customers, they all share some of the challenges of modern technology:

  • High competitive pressure in global markets: The race for valuable resources included.
  • Rapid technological development, especially in microelectronics, materials technology and the semiconductor industry.
  • Intensive cost and efficiency pressure coupled with increasing demands on quality and delivery times.
  • Tools made for high volume productions.

Your challenge

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Our key strengths

Make success measurable. Are you faced with unsolved measurement tasks in the subnano range? Complex individual process requirements? Focus on the essence: the productive success of your company. We are at your side for everything else. E+H develops your customized metrology and automation basis.

  • Innovation requires experience: We ensure valuable competitive advantages for you through pioneering, customizable technology made in Germany.
  • Our mature, reliable high-precision products provide reproducible results according to international calibration standards.
  • We offer the best cost/benefit ratio imaginable through low product costs, extremely long service life and exceptionally low maintenance and support requirements.
  • Our systems ensure the highest throughput and efficient control of your production.
  • Our distributor network supports you with experienced engineers on site worldwide.
  • All from one source: from consulting and development to production at our site in Germany as well as technical support after implementation. Each of our software solutions is developed in-house, as are the electronics, mechanics and construction.

Our expertise

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Ever since the pioneering days of measurement technology in the nanometer range, the E+H team has been putting its heart and soul into its work. Here we have summarized some of the most important stations for you:


E+H Metrology Relaunch



GNS Global Nanoscope

Makyoh technology rethought


Healthy growth

At the Karlsruhe location, E+H moves into new, larger premises for development, production, testing technology and support


AMA Innovations Award

E+H receives the coveted Ama Innovation Award for a pioneering deflectrometric measurement technology


450: When size matters

First company showing a 450mm tool at the Semicon in 2008


New management

After a successful 33 years, Wilfreid Eichhorn hands over the baton of company management to Daniel Raseghi


First 300 mm tools

At Semicon Europe we proudly presented the first 300 mm thickness and flatness gauge


Pioneers of photovoltaic

In the early nieneties, E+H was already at the forefront of technological development for the photovoltaic industry


First Semiconductor Application

The first geometry head was developed for one the first semiconductor applications: Measuring the thickness of a silicon wafer or any other conductive substrate


E+H was founded

Wilfried Eichhorn and Taddaeus Hausmann brought to life their business idea: a linear capacitive distance sensor with elimination of the cable capacity

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SEMI member ID 4817

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