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OEM integrated thickness gauge for 100-200mm silicon and insulating wafers.
The MX3014-Z is an in-line module for belt or robot transported wafers. It gauges thickness on the fly between automated manufacturing processes. Completely self-calibrating for effortless usage.
Wafer Diameter | 100 - 200mm |
Accuracy | ±1µm |
Resolution | 0.1µm |
Thickness range | 200 - 800 µm |
Software | EHMaster |
You have questions, wishes or an order?
We will be happy to consult you personally.