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MX 3014-Z
Application
OEM integrated thickness gauge for 100-200mm silicon and insulating wafers.
The MX3014-Z is an in-line module for belt or robot transported wafers. It gauges thickness on the fly between automated manufacturing processes. Completely self-calibrating for effortless usage.
Measurement type
Features
| Wafer Diameter | 100 - 200mm |
| Accuracy | ±1µm |
| Resolution | 0.1µm |
| Thickness range | 200 - 800 µm |
| Software | EHMaster |
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