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  • Industries
      Industries
    • Semiconductor & MEMSMetrology for microelectronics, wafer and chip manufacturing
    • Research & DevelopmentInnovative measurement technology for universities, research institutions and corporate development
    • Wafer ReclaimCost-effective, fast and reproducible measurement systems for reclaim & recycling
    • Technical CeramicsReliable measurement results for high-speed production cycles of sensitive high-performance ceramics
    • Mechanical EngineeringMeasurements on turbines, engines and plain bearings
    • Sensor SystemsCustomized capacitive sensor systems for extreme environmental conditions
    • Photovoltaic & SolarMeasuring instruments for inspection, qualification and process control of photovoltaic solar wafers.
  • Applications
      Applications
    • Surfaces
      • Waviness
      • Saw Marks
      • Roughness
      • Nanotopography
    • Geometry
      • Thickness
      • TTV (total thickness variation)
      • Warp and Bow
      • Film Stress
    • Electrical Properties
      • Resistivity
      • Sheet Resistance
      • P/N Dotation
    • Axles, Shafts and Bearings
      • Turbines and Motors
      • Shaft displacement on slide bearings
      • Axle Concentricity
    • Material Properties
      • Modulus of elasticity
      • Thermal expansion
      • Distance at lowest temperature
    • AutomationOur engineers develop efficient automation solutions for Industry 4.0
  • Products
      Products
    • Manual Tools
      • MX10 Series
        • MX 102-6
        • MX 102-8
        • MX 1012
        • MX 1018
      • MX20 Series
        • MX 203-4-21
        • MX 203-4-37-Q
        • MX 203-6-33
        • MX 203-6-33-B
        • MX 203-6-33-Q
        • MX 203-8-37
        • MX 203-8-37-B
        • MX 203-8-49-B
        • MX 203-58-37-B
        • MX 204-6-33
        • MX 204-6-13-V
        • MX 204-8-21-V
        • MX 204-8-21-TKO2
        • MX 204-8-37
        • MX 204-48-37
        • MX 2012
        • MX 2012-H
        • MX 2013
        • MX 2018-W
      • MX30 Series
        • MX 301-8
        • MX 301-AC
        • MX 301-Q
        • MX 3012
        • MX 3012-AC
        • MX 3014
        • MX 302
      • MX60 Series
        • MX 601
        • MX 604
        • MX 604-B
        • MX 604-S
        • MX 604-ST
        • MX 608
        • MX 6012
      • MX70 Series
        • MX 7012
        • MX 7018
    • OEM Integrated Tools
      • MX 152/153
      • MX 3014-Z
    • Automated Tools
      • Robot Sorters
      • Belt Sorters
      • Global Nanoscope
    • Photovoltaic & Solar
      • MX 204-8-73-q
      • MX 204-8-49-q
      • MX 203-6-41-q
      • MX 301-AC
      • MX 3012-AC
      • MX 604-ST
    • Sensor Systems
      • Distance Meters
        • MW 210-501
        • MW 210-700
        • MW 210-13-2
        • MW-V-2K
        • MW-V
        • MW-V-F
        • MZ1-M Pre-amplifier
      • Standard Sensors
        • AW 210-14-1
        • AW 210-53-3
        • AW 210-33-2
        • AW 210-23-1
        • AW 210-13-3
        • AW 210-13-2
        • AW 210-52-1
        • AW 210-22-3
        • AW 210-22-1
        • AW 210-51-1
      • Customized Sensors
      • Measuring Cables
        • L 33-11
        • L 33-12
        • L 33-13
        • L 33-14
        • L13-11
        • L13-12
        • L13-13
        • L13-14
    • Software
      • Operating Software
      • Waferstudio
  • Services
      Services
    • Contract MeasurementsImproved products for a stronger market position: With our contract measurements for wafers of any size and various materials
  • Company
      Company
    • About E+H MetrologyExperts in high technology for the outer limits of the measurable: Subnanometer measurement equipment and software.
    • ManagementInnovation is where dedicated engineers, developers, physicists and mechanics bring their skills together to create "made to measure" excellence.
    • CareerWe want to not only further develop technologies, but also create innovations and value. Are you with us?
    • Distributors & PartnersOur global network
    • GlossaryAll about precision measurement
  • Contact
Our Services
  • Contract Measurements
Our Products
  • Manual Tools
  • Automated Tools
  • OEM Integrated Tools
  • Photovoltaic & Solar
  • Sensor Systems
  • Software
Our Industries
  • Semiconductor & MEMS
  • Research & Development
  • Wafer Reclaim
  • Technical Ceramics
  • Mechanical Engineering
  • Sensor Systems
  • Photovoltaic & Solar
Contact

Headquarters
E+H Metrology GmbH
Griesbachstraße 12
Benzstraße 5-9
76185 Karlsruhe

+49-721-83118-0
info(at)eh-metrology.com

Applications
Surfaces
  • Waviness
  • Saw Marks
  • Roughness
  • Nanotopography
Geometry
  • Thickness
  • TTV (total thickness variation)
  • Warp and Bow
  • Film Stress
Electrical Properties
  • Resistivity
  • Sheet Resistance
  • P/N Dotation
Axles, Shafts and Bearings
  • Turbines and Motors
  • Shaft displacement on slide bearings
  • Axle Concentricity
Material Properties
  • Modulus of elasticity
  • Thermal expansion
Career
Management
Sales

Peter Michel
info(at)eh-metrology.com

Arrange consultation

© 2025 E+H Metrology GmbH
  • Privacy policy
  • Imprint
  • Search
  • Privacy policy
  • Imprint
  • Search
Career
Management
Our Services
  • Contract Measurements
Our Products
  • Manual Tools
  • Automated Tools
  • OEM Integrated Tools
  • Photovoltaic & Solar
  • Sensor Systems
  • Software
Our Industries
  • Semiconductor & MEMS
  • Research & Development
  • Wafer Reclaim
  • Technical Ceramics
  • Mechanical Engineering
  • Sensor Systems
  • Photovoltaic & Solar
Contact

Headquarters
E+H Metrology GmbH
Griesbachstraße 12
Benzstraße 5-9
76185 Karlsruhe

+49-721-83118-0
info(at)eh-metrology.com

Sales

Peter Michel
info(at)eh-metrology.com

Arrange consultation

© 2025 E+H Metrology GmbH
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