METROLOGY BELT SORTERS
Customization made easy
Whether for incoming and outgoing inspection, or quality control in the production process: safety and reliability are always the focus of our modular belt sorter systems. The modules enable specific sorting and measurements with our powerful and reliable MX systems, belt transport, sender & receiving stations with wafer switches and much more. Many decades of E+H experience ensure smooth integration into your production chain - exactly as your process requires.
- Convenient measurement of all common wafer characteristics
- Flexible integration of MX 202 WaferStream modules & components
- Long lifetime & low maintenance
- Customized production and individual support
- For various materials, wafer types and sizes
- Speed: several 100 up to 1000 wafers per hour
MX 202 WaferStream
The next generation modular belt sorter
MX 202 WaferStream is a state-of-the-art modular belt sorter, delivering highest wafer throughput, even surpassing modern robot sorters. Thanks to its modular design, it is freely configurable and can be upgraded at any time to grow with your needs:
- Several 100 up to 1000 wafers per hour
- Comprehensive measurement options, e.g. warp, bow, tickness/TTV, resistivity & many more
- For various materials & wafers up to 210mm diameter (300 mm on request)
- System intelligence & full process control by optical wafer tracking
- Unique E+H Geohead technology for wafer geometry measurement
- Full SECS/GEM connectivity, including customized recipes & wafer classes
- Manual or SEMI E84 automated carrier hand-off (AGV, OHT)
If you want to push your process to a higher level and learn more: don't hesitate to contact us.
Reliable & fast
Advantages and features
Despite their modular design, all our belt sorters share some unbeatable advantages:
- Mature, stable, and safe: based on decades of know-how, our belt sorters are continuously advanced & improved, culminating in the MX 202 WaferStream. In an industrial landscape where process reliability is the most important asset, we offer an unmatched competitive advantage
- High Speed: Time is throughput is cash. With several 100 up to 1,000 wafers per hour and extremely reliable measurement results, we help you gaining efficiency via production time
- Budget-friendly: All our components require exceptionally low maintenance, combined with low initial costs and extremely long lifetime.
- Process integration: Your Belt Sorter system can be seamlessly integrated into your process chain, just as our MX-NT V2 operating software can be integrated into your IT landscape
- Consulting and support: Individual consulting and planning are part of our DNA - including uncomplicated on-site support of our world-wide distributors.
Components & Modules
Customers use our Belt Sorters for a wide range of applications.
- Examples for typically installed measuring modules: Unique E+H Geohead sensor array AZ6 (6-33) or AZ8 (8-37) for wafer geometry, High throughput T-Module with single thickness sensor pair, Resistivity module with self-calibrating eddy current sensors, P/N sensor for doping type determination, and various types of readers (OCR, RFID, barcode).
- Wafer handling modules: Sender/receiver lifts, Aligner, Wafer switches to distribute Wafers in receiver area, movable units with mounted lifts, pass through stations.
- Software: All E+H wafer gauges & automation solutions are controlled by the powerful MX-NT V2 software, including evaluation and visualization. MX-NT V2 merges more than 30 years of E+H expericence in semiconductor requirements.
Sorting by any gained characteristic, such as grouping by thickness, warp or resistivity can be done by highly flexible and reusable recipes.
All data can be stored in a MS SQL Server data base or alternatively also into MS Access data bases.
Powerful software options such as full SECS/GEM connectivity including E84 or our similar proprietary Simple Soap Server One (S³O) interface allow seamless integration of E+H tools into your production plant.
WHICH TOOL
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