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MX 152/153

Application

OEM integrated thickness and resistivity gauge for 125 mm, 156 mm up to 230 mmm solar wafers.

The MX152/153 is an in-line module for belt-transported wafers. It gauges thickness, flatness (TTV) and optionally resistivity and P/N dotation on the fly between automated manufacturing processes. Consists of Measurement module, electronic rack and controlling computer. Measurement values will be tranfered to a host computer by ethernet and TCP/IP.

Measurement type

Thickness Flatness (TTV) Resistivity P/N Dotation

Features

Wafer Size 125x125 mm and 156x156 mm and up to 230 mm
Accuracy ±0.5µm
Resolution 0.1µm
Thickness range 100 - 300 µm
Software EHMaster

MX 152 & MX 153

  3-lines
thickness		 1-lines
thickness		 3-lines
Sheet resistance		 1-line
Sheet resistance		 P/N
MX 152 ✓        
MX 152-PN ✓       ✓
MX 152-R ✓     ✓  
MX 152-R-PN ✓     ✓ ✓
MX 152-3R ✓   ✓    
MX 152-3R-PN ✓   ✓   ✓
           
MX 153-T   ✓      
MX 153-T-PN   ✓     ✓
MX 153-R       ✓  
MX 153-R-PN       ✓ ✓
MX 153-3R     ✓    
MX 153-3R-PN     ✓   ✓
MX 153-RT   ✓   ✓  
MX 153-RT-PN   ✓   ✓ ✓
MX 153-3RT   ✓ ✓    
MX 153-3RT-PN   ✓ ✓   ✓
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Portrait of Heiko Rings, Production Manager (Mechanics) Sensor System Design

Heiko Rings

+49 (0)721 83118-16
sensors(at)eh-metrology.com

 

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