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MX 604


Fast contactless resistivity gauge for silicon blocks.

The MX604 gauges resistivity of silicon blocks of any size with the reliable eddy current method. It allows connecting up to 4
different sensor probes (alternatively) to measure different resistivity ranges. Integrated alphanumeric display. Workes as stand-alone or connected to a PC via serial interface. Our optional software EHMaster allows further evaluation of the measurements and configuration
of the tool.

Measurement type



Standard measuring range (one sensor) 0.25 Ω cm - 25 Ω cm
Accuracy ± 3%
Software EHMaster

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Peter Michel

+49 (0)721 83118-17


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