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MX 604-ST
Application
Combined thickness and resistivity gauge for up to 156mm solar wafers
The MX604-ST is designed to characterize solar wafers. Fits square wafers up to 156mm and round wafers from 2" to 200mm. It combines sensors for measuring thickness and resistivity simultaneously. Fully self-calibrating, thus temperature and humidity changes are negligible. Integrated alphanumeric display. Workes as stand-alone or connected to a PC via serial interface, which allows collecting data of multiple measurements, mean value or standard deviation of single wafers or of complete wafer lots.
Measurement type
Features
| Wafer Diameter | Square, Pseudo-Square up to 156 mm, 2" to 8" |
| Thickness Range | 60 - 300µm or 250 - 750µm |
| Thickness Accuracy | ± 1µm |
| Sensor Diameter | 20 mm |
| Active Area | 8 mm Ø |
| Distance from Edge | 10 mm |
| Measuring time | 0.3 s |
| Software | EHMaster |
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