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MX 604-ST


Combined thickness and resistivity gauge for up to 156mm solar wafers

The MX604-ST is designed to characterize solar wafers. Fits square wafers up to 156mm and round wafers from 2" to 200mm. It combines sensors for measuring thickness and resistivity simultaneously. Fully self-calibrating, thus temperature and humidity changes are negligible. Integrated alphanumeric display. Workes as stand-alone or connected to a PC via serial interface, which allows collecting data of multiple measurements, mean value or standard deviation of single wafers or of complete wafer lots.


Measurement type

Thickness Resistivity


Wafer Diameter Square, Pseudo-Square up to 156 mm, 2" to 8"
Thickness Range 60 - 300µm or 250 - 750µm
Thickness Accuracy ± 1µm
Sensor Diameter 20 mm
Active Area 8 mm Ø
Distance from Edge 10 mm
Measuring time 0.3 s
Software EHMaster

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Heiko Rings

+49 (0)721 83118-16


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