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MX20 - MULTIFUNCTIONAL
contactless wafer geometry gauge

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The MX20 series is best suited for incoming inspection, qualification of processes and process control for a large variation of silicon,  solar and other wafers. Partially integrable into automated processes.

Measurement types for the MX 20 Series:

Thickness Flatness (TTV) Bow Warp Film stress
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Home > Products > Manual Tools > MX20 Series

MX20 Series
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MX 2012

High precision chip production geometry gauge for 300mm silicon wafers.

MX 2012-H

fast chip production geometry gauge for 300mm silicon wafers.

MX 2013

Automatable geometry gauge for thin and standard 200mm or 300mm silicon wafers.

No Match? No Problem!

We are able to customize our products to a wide range of technical specifications. Which are yours?

MX 2018-W

Automatable bow and warp gauge for 450mm silicon wafers.

MX 203-4-21

Fast contactless geometry gauge for 2–4" silicon wafers.

MX 203-4-37-Q

Fast contactless geometry gauge for 2–4" non-conductive and semi-insulating wafers.

MX 203-58-37-B

Fast contactless geometry gauge for thin 125– 200mm silicon wafers.

MX 203-6-33

Fast contactless geometry gauge for 100–150mm silicon wafers.

MX 203-6-33-B

Fast contactless geometry gauge for thin 100–150mm silicon wafers.

MX 203-6-33-Q

Fast contactless geometry gauge for 75–200mm non-conductive and semi-insulating wafers.

MX 203-8-37

Fast contactless geometry gauge for 150mm and 200mm silicon wafers.

MX 203-8-37-B

Fast contactless geometry gauge for thin 150mm and 200mm silicon wafers.

MX 203-8-49-B

Fine mesh contactless geometry gauge for thin 150mm and 200mm silicon wafers.

MX 204-48-37

Automatable geometry gauge for 100, 150 and 200mm silicon wafers.

MX 204-6-13-V

Automatable geometry gauge for thin 100–150mm silicon wafers.

MX 204-6-33

Automatable geometry gauge for 100mm and 150mm silicon wafers.

MX 204-8-21-TKO2

Automatable geometry gauge for thin 150mm and 200mm Taiko silicon wafers.

MX 204-8-21-V

Automatable geometry gauge for thin 150mm and 200mm silicon wafers.

MX 204-8-37

Automatable geometry gauge for 150mm and 200mm silicon wafers.

WHICH TOOL
fits my needs?

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Portrait of Peter Michel, Product Sales Manager of E+H Metrology

Peter Michel

+49 (0)721 83118-17
sales(at)eh-metrology.com

 

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