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MX 203-4-37-Q


Fast contactless geometry gauge for 2–4" non-conductive and semi-insulating wafers.

High throughput: the MX203-4-37-Q gauges with its 37 measuring points every wafer within max. 10 seconds. It controls thickness and flatness. Flexible wafer size adjustment by various centering-frames. Suitable for wafers made of non-conductive substrates (Quartz, Saphire, Lithium Niobate, Lithium Tantalate) and semi-insulating materials like Gallium Arsenide or Silicon Carbide. Comes with our powerful MX-NT operating software.

Measurement type

Thickness Flatness (TTV)


Wafer Diameter 50mm, 75mm, 100mm
Accuracy ±1 µm
Resolution 0.1µm
Thickness range 300 - 800 µm
Non-conductive substrates yes
Semi-insluation materials above 107 Ohm*cm
Software MXNT

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Peter Michel

+49 (0)721 83118-17


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