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MX 604-S


Fast sheet resistance gauge for 50–200mm silicon wafers and conductive films.

The MX604-S gauges sheet resistance of semiconducting wafers and conductive films on high-ohm substrates with the reliable eddy current method.  Fully self-calibrating, thus temperature and humidity changes are negligible. Integrated alphanumeric display. Workes as stand-alone or connected to a PC via serial interface, which allows collecting data of multiple measurements, mean value or standard deviation of single wafers or of complete wafer lots.

Measurement type

Thickness Sheet resistance


Wafer Diameter 2" to 200mm
Thickness max. 1000 μm
Accuracy ±3µm
Sensor Diameter 20mm
Active Area ca. 12mm
Distance from Edge min. 10mm
Gap between Sensor and Table 1400 μm
Measuring Table 300 x 300 mm
Measuring Time 0.3 s
Software EHMaster

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Peter Michel

+49 (0)721 83118-17


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