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Fast sheet resistance gauge for 50–200mm silicon wafers and conductive films.
The MX604-S gauges sheet resistance of semiconducting wafers and conductive films on high-ohm substrates with the reliable eddy current method. Fully self-calibrating, thus temperature and humidity changes are negligible. Integrated alphanumeric display. Workes as stand-alone or connected to a PC via serial interface, which allows collecting data of multiple measurements, mean value or standard deviation of single wafers or of complete wafer lots.
Wafer Diameter | 2" to 200mm |
Thickness | max. 1000 μm |
Accuracy | ±3µm |
Sensor Diameter | 20mm |
Active Area | ca. 12mm |
Distance from Edge | min. 10mm |
Gap between Sensor and Table | 1400 μm |
Measuring Table | 300 x 300 mm |
Measuring Time | 0.3 s |
Software | EHMaster |
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We will be happy to consult you personally.