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Easy one-point thickness gauge for 30–200mm semiconducting and metallic materials.
The MX301-AC is a robust and stable instrument for quick and simple manual thickness gauge. Made for a large variety of silicon and solar wafers and pieces of semiconducting or metallic materials. Fully self-calibrating without the need for gauge blocks nor reference wafers. With integrated 5-digit display.Workes as stand-alone or connected to a PC via serial interface, which allows collecting data of multiple measurements, calculating flatness (TTV), mean value or standard deviation of single wafers or of complete wafer lots.
Wafer Diameter | up to 200mm |
Thickness Accuracy | ±0.5µm |
Resolution | 10nm |
Dynamic range | 800µm |
Thickness range | default 200 - 1000 µm |
Software | EHMaster |
You have questions, wishes or an order?
We will be happy to consult you personally.