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MX 301-AC


Easy one-point thickness gauge for 30–200mm semiconducting and metallic materials.

The MX301-AC is a robust and stable instrument for quick and simple manual thickness gauge. Made for a large variety of silicon and solar wafers and pieces of semiconducting or metallic materials. Fully self-calibrating without the need for gauge blocks nor reference wafers. With integrated 5-digit display.Workes as stand-alone or connected to a PC via serial interface, which allows collecting data of multiple measurements, calculating flatness (TTV), mean value or standard deviation of single wafers or of complete wafer lots.

Measurement type



Wafer Diameter up to 200mm
Thickness Accuracy ±0.5µm
Resolution 10nm
Dynamic range 800µm
Thickness range default 200 - 1000 µm
Software EHMaster

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Peter Michel

+49 (0)721 83118-17


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