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MX 601

Application

Fast contactless resistivity gauge for semi-insulating wafers up to 150mm.

The MX601 gauges resistivity of wafers made of semi-insulating materials like Gallium Arsenide or Silicon Carbide. Fast handling without wafer preparation and excellent repeatability with best avoidance of piezo-electric effects. MX601’s serial interface allows data evaluation and statistics, as well as access to calibration constants and output types.


Measurement type

Thickness

Features

Wafer Diameter up to 150mm
Sensor Area Ø 10mm
Thickness range 350 - 650 µm
Measuring Time max. 4 sec.
Reproducibility ± 1%
Software EHMaster

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Peter Michel

+49 (0)721 83118-17
sales(at)eh-metrology.com

 

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