For:

Thickness, TTV, Resistivity, Dotation (PN)

 Features:

• One or two scans (90°) possible
• 1 up to 57 measurement points
• Wafer diameter up to 300mm

     Thickness:

• Dynamic range 300µm
• Accuracy ±0.3µm
• Resolution 10nm

    Resistivity:

• Range: 0.001 up to 200 ohm*cm

    Dotation:

• Range: 0.02 up to 200 ohm*cm