For:
Thickness, TTV, Resistivity, Dotation (PN)
Features:
- One or two scans (90°) possible
- 1 up to 57 measurement points
- Wafer diameter up to 300mm
Thickness:
- Dynamic range 300µm
- Accuracy ±0.3µm
- Resolution 10nm
Resistivity:
- Range: 0.001 up to 200 ohm*cm
Dotation:
- Range: 0.02 up to 200 ohm*cm