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Metrology Solutions for the
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MX 301-8
For:
Thickness
Features:
Default thickness range 200 - 1000µm
Dynamic Range 800µm
Wafer diameter up to 8"
Accuracy ±0.5µm
Resolution 0.1µm
Switchable to measure high res material
Software EHMaster
Products by Series
Thickness, TTV
MX 10x series
Thickness, TTV, Resistivity, P/N
MX 15x
Thickness, TTV, Geometry, Stress*
MX 20x series
One point thickness
MX 30x series
Unframed Wafers
MX 301-8
MX 301-8-S
MX 3012
Framed Wafers
MX 3014
Resistivity, Thickness, TTV, P/N
MX 60x series
Surface Profile, Thickness, Geometry
MX 70x series