Metrology Solutions for the
Semiconductor and PV/Solar
World
Capacitive Standard Sensors
Standard sensor types
Legend
Measuring cable
Type A L13-11, L13-13, L33-11, L33-13
Type B L13-12, L13-14, L33-12, L33-14
Special characteristics
Type 1 Vacuum closeness, high temperature
Type 2 Cheap, suitable for measurements in
the lowest temperature technique
Type 3 Vacuum closeness, high temperature
lowest temerature dependence
Comparison
| AW 210-14-1 | AW 210-53-3 | AW 210-33-2 | AW 210-23-1 | AW 210-13-3 | |
| Measuring range (µm) | 0-10000 | 0-5000 | 0-3000 | 0-2000 | 0-1000 |
| Tolerance of sensitivity (%) | ±0.5 | ±0.5 | ±0.5 | ±0.5 | ±0.5 |
| Active area (mm) | 17.7 | 12.6 | 9.8 | 7.9 | 5.5 |
| Max. temperature (°C) | 200 | 200 | 200 | 200 | 100 |
| Change of sensitivity (x10E-5) | -3 | -3 | -3 | -3 | -3 |
| Elongation (µm/K) | 0.17 | 0.17 | 0.17 | 0.17 | 0.17 |
| Isolation | Epoxy | Epoxy | Epoxy | Epoxy | Epoxy |
| Housing (DIN EN 10 027-2) | 1.4305 | 1.4305 | 1.4305 | 1.4305 | 1.4305 |
| Weight (g) | 230 | 120 | 95 | 61 | 7.1 |
| Measuring cable | Type A | Type A | Type A | Type A | Type A |
| Special characteristics | Type 1 | Type 1 | Type 1 | Type 1 | Type 2 |
| AW 210-13-2 | AW 210-52-1 | AW 210-22-3 | AW 210-22-1 | AW 210-51-1 | |
| Measuring range (µm) | 0-1000 | 0-500 | 0-200 | 0-200 | 0-50 |
| Tolerance of sensitivity (%) | ±0.5 | ±0.5 | ±1 | ±1 | ±2 |
| Active area (mm) | 5.5 | 3.8 | 2.3 | 2.3 | 1.1 |
| Max. temperature (°C) | 200 | 200 | 200 | 200 | 200 |
| Change of sensitivity (x10E-5) | -1.1 | -1.1 | -0.3 | -1.1 | -0.3 |
| Elongation (µm/K) | 0.06 | 0.06 | 0.03 | 0.06 | 0.03 |
| Isolation | Epoxy | Epoxy | Epoxy | Epoxy | Epoxy |
| Housing (DIN EN 10 027-2) | 1.4104 | 1.4104 | 1.3912 | 1.4104 | 1.3912 |
| Weight (g) | 7.1 | 5.7 | 2.5 | 2 | 1.7 |
| Measuring cable | Type A | Type B | Type B | Type B | Type B |
| Special characteristics | Type 1 | Type 1 | Type 3 | Type 1 | Type 3 |
Standard Sensors
Products
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