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Local WarpF, Max. Neg. Warp, Max. Pos. Warp, Total Warp (GMLYMER)

Applying the least squares fit algorithm to center line values yields local deviations
with respect to the approximated plane computed here. These are called Local Warp
Values, their extrema are called Maximum Negative and Maximum Positive Warp,
Total Warp is the sum of the absolute values of those two extrema.

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Further terms related to the measurement of wafers, such as measurable properties, measurement methods, measurement results, and forms of representation:
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