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Shape

The mean value computed from the thickness values at the edge of wafer is
subtracted from the center thickness value.

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\( \text { Shape }=\text { CntThk }-\frac{\sum_{i:=1}^{n(\text { Shape })} \operatorname{Th} k(\text { Shape }(i))}{n(\text { Shape })} \)

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Further terms related to the measurement of wafers, such as measurable properties, measurement methods, measurement results, and forms of representation:
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