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Thickness (LThk, CntThk)

The Thickness of the wafer at a given sensor pair results from the difference of Total Distance minus distance at bottom sensor minus distance at top sensor.

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\(\operatorname{Thk}(i)=\text { TotDist }- \text { Bottom }(i)-T o p(i)\)

\(LThk \quad=\quad Local\:thickness\:values\:on\:every\:sensor\:pair \)
\(CntThk \quad= Thickness\:value\:in\:the\:middle\)

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Further terms related to the measurement of wafers, such as measurable properties, measurement methods, measurement results, and forms of representation:
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