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Standard Thickness (StdThk)

\(\bar{x}=\frac{x_{1}+x_{2}+\cdots+x_{N}}{N}=\frac{1}{N} \sum_{i=1}^{N} x_{i}\)

\(s=\sqrt{\frac{1}{N-1} \sum_{i=1}^{N}\left(x_{i}-\bar{x}\right)^{2}}\)

\(\mathrm{N} \quad= number\:of\:local\:thickness\:values\)

\(\bar{x}= arithmetic\:mean\:value\)

\(\mathrm{s} \quad= thickness\:sample\:standard\:deviation\)

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Further terms related to the measurement of wafers, such as measurable properties, measurement methods, measurement results, and forms of representation:
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