According SEMI’s Shape Decision Tree there is a very small difference only,
depending on TTV. With low TTV values the difference is really negligible:
The original Japanese SORI definition (and also German DIN) has a serious
difference:
The wafer is resting on a flat plane, not gravity corrected!
In direct contact, we can best determine how we can help you overcome your challenges. Write to us:
Headquarters
E+H Metrology GmbH
Griesbachstraße 12
Benzstraße 5-9
76185 Karlsruhe
+49-721-83118-0
info(at)eh-metrology.com
Headquarters
E+H Metrology GmbH
Griesbachstraße 12
Benzstraße 5-9
76185 Karlsruhe
+49-721-83118-0
info(at)eh-metrology.com